Modeling the Structural-Thermal-Electrical Coupling in an Electrostatically Actuated MEMS Switch and Its Impact on the Switch Stability

Figure 5

The static profile of the switch for 𝐕_DC=90 Volt, 𝐼=4 A with and without considering the effect of temperature, that is, (𝑇(𝑥)≠0, and 𝑇(𝑥)=0, resp.).