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Mathematical Problems in Engineering
Volume 2013, Article ID 608107, 8 pages
http://dx.doi.org/10.1155/2013/608107
Research Article

Modeling the Structural-Thermal-Electrical Coupling in an Electrostatically Actuated MEMS Switch and Its Impact on the Switch Stability

1Mechanical Engineering Department, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia
2Mechanical Engineering Department, State University of New York at Binghamton, Binghamton, NY 13902, USA

Received 22 February 2013; Revised 6 July 2013; Accepted 30 July 2013

Academic Editor: Eihab M. Abdel-Rahman

Copyright © 2013 Hassen M. Ouakad and Mohammad I. Younis. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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