Enhancing the Long-Term Yield Competitiveness of a Semiconductor Manufacturing Factory Using a Multiobjective Fuzzy Nonlinear Programming Approach

<table class="table-group" id="tab5"><tr><td><table class="table"><tr><td class="thead-hr" colspan="7"><hr/></td></tr><tr class="thead"><td align="left">Round</td><td align="center"><svg height="15.675" id="M162" style="vertical-align:-3.27605pt" version="1.1" viewbox="0 0 18.7125 15.675" width="18.7125" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.537)"><path d="M698 636l-541 -596q60 -5 176 -5q91 0 138.5 5t69.5 24q44 36 85 124l29 -15q-38 -125 -64 -173h-559l-9 16l545 598h-182q-81 0 -109 -8t-48 -31q-26 -29 -55 -103l-29 3q23 86 42 200h22q11 -16 21 -20.5t34 -4.5h428z" id="x1D44D"></path></g>
<g transform="matrix(.012,-0,0,-.012,12.313,15.613)"><path d="M412 140l28 -9q0 -2 -35 -131h-373v23q112 112 161 170q59 70 92 127t33 115q0 63 -31 98t-86 35q-75 0 -137 -93l-22 20l57 81q55 59 135 59q69 0 118.5 -46.5t49.5 -122.5q0 -62 -29.5 -114t-102.5 -130l-141 -149h186q42 0 58.5 10.5t38.5 56.5z" id="x32"></path></g>
</svg> goal</td><td align="center"><span style="width: 19.987499px;"><svg height="17.825001" id="M163" style="vertical-align:-3.27605pt" version="1.1" viewbox="0 0 19.987499 17.825001" width="19.987499" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,13.688)"><path d="M698 636l-541 -596q60 -5 176 -5q91 0 138.5 5t69.5 24q44 36 85 124l29 -15q-38 -125 -64 -173h-559l-9 16l545 598h-182q-81 0 -109 -8t-48 -31q-26 -29 -55 -103l-29 3q23 86 42 200h22q11 -16 21 -20.5t34 -4.5h428z" id="x1D44D"></path></g>
<g transform="matrix(.012,-0,0,-.012,12.313,5.525)"><path d="M471 153q-22 -15 -61 -13q-25 31 -45.5 49.5t-56.5 41.5q4 -71 28 -134q-17 -33 -42 -46q-24 12 -42 46q24 63 28 134q-36 -23 -56.5 -41.5t-45.5 -49.5q-36 -2 -61 13q0 28 19 59q65 10 130 43q-65 33 -130 43q-19 31 -19 59q22 15 61 13q25 -31 45.5 -49.5t56.5 -41.5
q-4 71 -28 134q17 33 42 46q24 -12 42 -46q-24 -63 -28 -134q36 23 56.5 41.5t45.5 49.5q36 2 61 -13q0 -28 -19 -59q-65 -10 -130 -43q65 -33 130 -43q19 -31 19 -59z" id="x2217"></path></g><g transform="matrix(.012,-0,0,-.012,12.313,17.763)"><path d="M384 0h-275v27q67 5 81.5 18.5t14.5 68.5v385q0 38 -7.5 47.5t-40.5 10.5l-48 2v24q85 15 178 52v-521q0 -55 14.5 -68.5t82.5 -18.5v-27z" id="x31"></path></g>
</svg></span></td><td align="center"><span style="width: 19.987499px;"><svg height="17.825001" id="M164" style="vertical-align:-3.27605pt" version="1.1" viewbox="0 0 19.987499 17.825001" width="19.987499" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,13.688)"><path d="M698 636l-541 -596q60 -5 176 -5q91 0 138.5 5t69.5 24q44 36 85 124l29 -15q-38 -125 -64 -173h-559l-9 16l545 598h-182q-81 0 -109 -8t-48 -31q-26 -29 -55 -103l-29 3q23 86 42 200h22q11 -16 21 -20.5t34 -4.5h428z" id="x1D44D"></path></g>
<g transform="matrix(.012,-0,0,-.012,12.313,5.525)"><path d="M471 153q-22 -15 -61 -13q-25 31 -45.5 49.5t-56.5 41.5q4 -71 28 -134q-17 -33 -42 -46q-24 12 -42 46q24 63 28 134q-36 -23 -56.5 -41.5t-45.5 -49.5q-36 -2 -61 13q0 28 19 59q65 10 130 43q-65 33 -130 43q-19 31 -19 59q22 15 61 13q25 -31 45.5 -49.5t56.5 -41.5
q-4 71 -28 134q17 33 42 46q24 -12 42 -46q-24 -63 -28 -134q36 23 56.5 41.5t45.5 49.5q36 2 61 -13q0 -28 -19 -59q-65 -10 -130 -43q65 -33 130 -43q19 -31 19 -59z" id="x2217"></path></g><g transform="matrix(.012,-0,0,-.012,12.313,17.763)"><path d="M412 140l28 -9q0 -2 -35 -131h-373v23q112 112 161 170q59 70 92 127t33 115q0 63 -31 98t-86 35q-75 0 -137 -93l-22 20l57 81q55 59 135 59q69 0 118.5 -46.5t49.5 -122.5q0 -62 -29.5 -114t-102.5 -130l-141 -149h186q42 0 58.5 10.5t38.5 56.5z" id="x32"></path></g>
</svg></span></td><td align="center"><span style="width: 26.975px;"><svg height="18.7125" id="M165" style="vertical-align:-3.9858pt" version="1.1" viewbox="0 0 26.975 18.7125" width="26.975" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,13.688)"><path d="M600 0h-557v24l268 633l28 8l261 -641v-24zM497 50l-194 489l-196 -489h390z" id="x394"></path></g><g transform="matrix(.017,-0,0,-.017,10.959,13.688)"><path d="M474 429q-19 -69 -47 -222l-65 -347q-8 -49 0 -60t49 -16l26 -3l-4 -26l-246 -12l4 25l17 3q37 6 50 20.5t23 60.5l67 321h-2q-65 -79 -150 -138q-69 -47 -104 -47q-28 0 -48.5 32t-20.5 81q0 78 35 148t90 117q67 57 161 77q23 5 58 5q43 0 90 -15zM387 387
q-30 16 -75 16q-58 0 -92 -27q-49 -39 -78.5 -112t-29.5 -136q0 -34 8.5 -52.5t21.5 -18.5q40 0 109.5 63.5t103.5 115.5q16 53 32 151z" id="x1D45E"></path></g>
<g transform="matrix(.012,-0,0,-.012,19.3,5.525)"><path d="M471 153q-22 -15 -61 -13q-25 31 -45.5 49.5t-56.5 41.5q4 -71 28 -134q-17 -33 -42 -46q-24 12 -42 46q24 63 28 134q-36 -23 -56.5 -41.5t-45.5 -49.5q-36 -2 -61 13q0 28 19 59q65 10 130 43q-65 33 -130 43q-19 31 -19 59q22 15 61 13q25 -31 45.5 -49.5t56.5 -41.5
q-4 71 -28 134q17 33 42 46q24 -12 42 -46q-24 -63 -28 -134q36 23 56.5 41.5t45.5 49.5q36 2 61 -13q0 -28 -19 -59q-65 -10 -130 -43q65 -33 130 -43q19 -31 19 -59z" id="x2217"></path></g><g transform="matrix(.012,-0,0,-.012,19.3,18.65)"><path d="M384 0h-275v27q67 5 81.5 18.5t14.5 68.5v385q0 38 -7.5 47.5t-40.5 10.5l-48 2v24q85 15 178 52v-521q0 -55 14.5 -68.5t82.5 -18.5v-27z" id="x31"></path></g>
</svg></span></td><td align="center"><span style="width: 26.975px;"><svg height="18.7125" id="M166" style="vertical-align:-3.9858pt" version="1.1" viewbox="0 0 26.975 18.7125" width="26.975" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,13.688)"><path d="M600 0h-557v24l268 633l28 8l261 -641v-24zM497 50l-194 489l-196 -489h390z" id="x394"></path></g><g transform="matrix(.017,-0,0,-.017,10.959,13.688)"><path d="M474 429q-19 -69 -47 -222l-65 -347q-8 -49 0 -60t49 -16l26 -3l-4 -26l-246 -12l4 25l17 3q37 6 50 20.5t23 60.5l67 321h-2q-65 -79 -150 -138q-69 -47 -104 -47q-28 0 -48.5 32t-20.5 81q0 78 35 148t90 117q67 57 161 77q23 5 58 5q43 0 90 -15zM387 387
q-30 16 -75 16q-58 0 -92 -27q-49 -39 -78.5 -112t-29.5 -136q0 -34 8.5 -52.5t21.5 -18.5q40 0 109.5 63.5t103.5 115.5q16 53 32 151z" id="x1D45E"></path></g>
<g transform="matrix(.012,-0,0,-.012,19.3,5.525)"><path d="M471 153q-22 -15 -61 -13q-25 31 -45.5 49.5t-56.5 41.5q4 -71 28 -134q-17 -33 -42 -46q-24 12 -42 46q24 63 28 134q-36 -23 -56.5 -41.5t-45.5 -49.5q-36 -2 -61 13q0 28 19 59q65 10 130 43q-65 33 -130 43q-19 31 -19 59q22 15 61 13q25 -31 45.5 -49.5t56.5 -41.5
q-4 71 -28 134q17 33 42 46q24 -12 42 -46q-24 -63 -28 -134q36 23 56.5 41.5t45.5 49.5q36 2 61 -13q0 -28 -19 -59q-65 -10 -130 -43q65 -33 130 -43q19 -31 19 -59z" id="x2217"></path></g><g transform="matrix(.012,-0,0,-.012,19.3,18.65)"><path d="M412 140l28 -9q0 -2 -35 -131h-373v23q112 112 161 170q59 70 92 127t33 115q0 63 -31 98t-86 35q-75 0 -137 -93l-22 20l57 81q55 59 135 59q69 0 118.5 -46.5t49.5 -122.5q0 -62 -29.5 -114t-102.5 -130l-141 -149h186q42 0 58.5 10.5t38.5 56.5z" id="x32"></path></g>
</svg></span></td><td align="center"><span style="width: 26.975px;"><svg height="18.85" id="M167" style="vertical-align:-4.10045pt" version="1.1" viewbox="0 0 26.975 18.85" width="26.975" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,13.688)"><path d="M600 0h-557v24l268 633l28 8l261 -641v-24zM497 50l-194 489l-196 -489h390z" id="x394"></path></g><g transform="matrix(.017,-0,0,-.017,10.959,13.688)"><path d="M474 429q-19 -69 -47 -222l-65 -347q-8 -49 0 -60t49 -16l26 -3l-4 -26l-246 -12l4 25l17 3q37 6 50 20.5t23 60.5l67 321h-2q-65 -79 -150 -138q-69 -47 -104 -47q-28 0 -48.5 32t-20.5 81q0 78 35 148t90 117q67 57 161 77q23 5 58 5q43 0 90 -15zM387 387
q-30 16 -75 16q-58 0 -92 -27q-49 -39 -78.5 -112t-29.5 -136q0 -34 8.5 -52.5t21.5 -18.5q40 0 109.5 63.5t103.5 115.5q16 53 32 151z" id="x1D45E"></path></g>
<g transform="matrix(.012,-0,0,-.012,19.3,5.525)"><path d="M471 153q-22 -15 -61 -13q-25 31 -45.5 49.5t-56.5 41.5q4 -71 28 -134q-17 -33 -42 -46q-24 12 -42 46q24 63 28 134q-36 -23 -56.5 -41.5t-45.5 -49.5q-36 -2 -61 13q0 28 19 59q65 10 130 43q-65 33 -130 43q-19 31 -19 59q22 15 61 13q25 -31 45.5 -49.5t56.5 -41.5
q-4 71 -28 134q17 33 42 46q24 -12 42 -46q-24 -63 -28 -134q36 23 56.5 41.5t45.5 49.5q36 2 61 -13q0 -28 -19 -59q-65 -10 -130 -43q65 -33 130 -43q19 -31 19 -59z" id="x2217"></path></g><g transform="matrix(.012,-0,0,-.012,19.3,18.65)"><path d="M285 378v-2q65 -13 102 -54.5t37 -97.5q0 -57 -30.5 -104.5t-74 -75t-85.5 -42t-72 -14.5q-31 0 -59.5 11t-40.5 23q-19 18 -16 36q1 16 23 33q13 10 24 0q58 -51 124 -51q55 0 88 40t33 112q0 64 -39 96.5t-88 32.5q-29 0 -64 -11l-6 29q77 25 118 57.5t41 84.5
q0 45 -26.5 69.5t-68.5 24.5q-67 0 -120 -79l-20 20l43 63q51 56 127 56h1q66 0 107 -37t41 -95q0 -42 -31 -71q-22 -23 -68 -54z" id="x33"></path></g>
</svg></span></td></tr><tr><td class="thead-hr" colspan="7"><hr/></td></tr><tr><td align="left">1</td><td align="center">0</td><td align="center">0.122</td><td align="center">1</td><td align="center">−7843</td><td align="center">10000</td><td align="center">−2157</td></tr><tr><td align="left">2</td><td align="center">1</td><td align="center">0.122</td><td align="center">1</td><td align="center">−7843</td><td align="center">10000</td><td align="center">−2157</td></tr><tr><td align="left">3</td><td align="center">2</td><td align="center">0.005</td><td align="center">2</td><td align="center">4626</td><td align="center">4694</td><td align="center">−9320</td></tr><tr><td align="left">4</td><td align="center">3</td><td align="center">NA</td><td align="center">NA</td><td align="center">NA</td><td align="center">NA</td><td align="center">NA</td></tr><tr class="table-tr"><td colspan="7"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Mathematical Problems in Engineering

tab5

Table 5

Table 5: Enhancing the Long-Term Yield Competitiveness of a Semiconductor Manufacturing Factory Using a Multiobjective Fuzzy Nonlinear Programming Approach 

Table 5 | Enhancing the Long-Term Yield Competitiveness of a Semiconductor Manufacturing Factory Using a Multiobjective Fuzzy Nonlinear Programming Approach 