An Inversely Designed Model for Calculating Pull-In Limit and Position of Electrostatic Fixed-Fixed Beam Actuators

Table 1

COMSOL Simulation Pull-in Results of a Fixed-Fixed Beam with length = 200 μm, width = 50 μm, thickness = 1 μm, Young Modulus = 160 GPa, Poisson Ratio = 0.22.

Initial Gap (m)	Pull-in Gap (m)	Pull-in Gap/Initial Gap
2	0.797	0.3985
4	1.594	0.3985
5	1.992	0.3984
10	3.984	0.3984