An Inversely Designed Model for Calculating Pull-In Limit and Position of Electrostatic Fixed-Fixed Beam Actuators

Table 4

Comparison of IPM and IPMF with previous simulation results.  μm,  GPa, ,  μm,  μm and  μm in each case.

Residual Stress, , (MPa)	0	100	−25
CoSolve [17]	20.30	35.80	13.70
V (2D) [17] (Δ%)	20.20 (0.50%)	35.40 (1.11%)	13.80 (0.73%)
OCI Model [12] (Δ%)	20.20 (0.50%)	35.91 (0.31%)	13.71 (0.07%)
GDQM [15] (Δ%)	20.36 (0.30%)	35.99 (0.53%)	13.60 (0.73%)
IPM (Δ%)	19.96 (1.67%)	19.96 (44.25%)	19.96 (45.69%)
IPMF (Δ%)	20.11 (0.94%)	35.25 (1.54%)	13.97 (1.97%)