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Mathematical Problems in Engineering
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Mathematical Problems in Engineering
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2014
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Article
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Fig 14
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Research Article
Development of a Flat Type Six-Axis Stage Based on Piezoelectric Actuators
Figure 14
Stepwise test results for each axis: (a)
-axis; (b)
-axis; (c)
-axis; (d)
; (e)
; (f)
.
(a)
(b)
(c)
(d)
(e)
(f)