Research Article

Development of a Flat Type Six-Axis Stage Based on Piezoelectric Actuators

Figure 14

Stepwise test results for each axis: (a) -axis; (b) -axis; (c) -axis; (d) ; (e) ; (f) .
523786.fig.0014a
(a)
523786.fig.0014b
(b)
523786.fig.0014c
(c)
523786.fig.0014d
(d)
523786.fig.0014e
(e)
523786.fig.0014f
(f)