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Mathematical Problems in Engineering
Volume 2014, Article ID 523786, 16 pages
http://dx.doi.org/10.1155/2014/523786
Research Article

Development of a Flat Type Six-Axis Stage Based on Piezoelectric Actuators

1Center for Measurement Standards, Industrial Technology Research Institute, Hsinchu 300, Taiwan
2Department of Mechanical Engineering, National Chung-Hsing University, Taichung 402, Taiwan
3Department of Industrial Education and Technology, National Changhua University of Education, Changhua 500, Taiwan

Received 18 May 2014; Accepted 1 July 2014; Published 25 September 2014

Academic Editor: Teen-Hang Meen

Copyright © 2014 Hau-Wei Lee et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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