Research Article

Modeling the Boron-Doping Silicon Beam by a Multilayer Model

Table 3

Rigidity constants of boron-doping beams.

Thickness (µm)3035404550
COMSOL (kN/m)0.5280.8311.2281.7322.350
FEL (kN/m)0.5600.8751.2851.8022.435
Relative error 6.06%5.29%4.64%4.04%3.62%