Research Article
Modeling the Boron-Doping Silicon Beam by a Multilayer Model
Table 3
Rigidity constants of boron-doping beams.
| Thickness (µm) | 30 | 35 | 40 | 45 | 50 | COMSOL (kN/m) | 0.528 | 0.831 | 1.228 | 1.732 | 2.350 | FEL (kN/m) | 0.560 | 0.875 | 1.285 | 1.802 | 2.435 | Relative error | 6.06% | 5.29% | 4.64% | 4.04% | 3.62% |
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