A Novel Time-Varying Friction Compensation Method for Servomechanism

Table 3

Friction compensation performance indicators during the reverse motion of -axis.

Trajectory	WTFC (µm)				WFC (µm)				WDOB (µm)
	= 500 mm·min^−1; = 25 mm,  mm·s^−2	6.89	3.33	6.93	3.84	2.50	1.54	2.53	1.61	4.96	2.24	4.73	2.62
= 1000 mm·min^−1; = 25 mm,  mm·s^−2	13.37	4.70	13.36	6.25	2.06	0.81	2.07	0.97	10.56	3.19	10.01	2.92
= 2000 mm·min^−1; = 25 mm,  mm·s^−2	18.99	6.26	19.11	8.56	4.15	1.36	4.09	1.72	17.09	4.63	16.79	5.7
= 3000 mm·min^−1; = 25 mm,  mm·s^−2	20.09	7.46	20.21	9.66	5.3	2.09	5.29	2.46	18.95	5.84	17.95	8.15

WTFC: without friction compensation; WFC: with friction compensation; WDOB: with disturbance observer.