A Novel Time-Varying Friction Compensation Method for Servomechanism

Table 4

Friction compensation performance indicators during the reverse motion of -axis.

Trajectory	WTFC (µm)				WFC (µm)				WDOB (µm)
	mm·min^−1; mm,  mm·s^−2	6.18	2.49	6.17	3.09	1.72	0.74	1.69	0.80	3.13	1.45	3.10	1.68
mm·min^−1; mm,  mm·s^−2	7.47	2.52	7.42	3.32	1.37	0.43	1.32	0.53	4.79	1.67	4.58	1.56
mm·min^−1; mm,  mm·s^−2	10.94	3.09	10.89	4.32	2.75	0.78	2.66	1.02	8.24	2.08	8.03	2.48
mm·min^−1; mm,  mm·s^−2	14.42	3.91	14.41	5.76	4.14	1.45	4.16	1.78	12.90	2.99	11.25	4.39

WTFC: without friction compensation; WFC: with friction compensation; WDOB: with disturbance observer.