On Synergistic Integration of Adaptive Dithering Based Internal Model Control for Hysteresis Compensation in Piezoactuated Nanopositioner

Table 1

Variation of harmonic ratios with input variation.

(μm)	(dB)	(dB)	(dB)
10	−8.377	−5.197	−2.977
20	−10.020	−4.408	−2.640
40	−9.140	−4.345	−2.960
80	−9.164	−4.359	−2.881
110	−9.164	−4.359	−2.881
150	−9.114	−4.365	−2.855
200	−9.117	−4.321	−2.915
300	−9.321	−4.342	−2.945