On Synergistic Integration of Adaptive Dithering Based Internal Model Control for Hysteresis Compensation in Piezoactuated Nanopositioner

Table 2

Identified dynamic model parameters of the micromanipulator with Dahl hysteresis.

Parameter	Value	Unit
	0.041	kg
	13.53	N s/m
	26.8 × 10^6	N/m
	0.0108	C/m
	386.854	—
	2.315 × 10^6	—
	1.021 × 10^6	—
	0	—