Research Article
On Synergistic Integration of Adaptive Dithering Based Internal Model Control for Hysteresis Compensation in Piezoactuated Nanopositioner
Table 4
Two-dimensional RMS circular contouring errors of the XY parallel manipulator characterized with FFT ADC system.
| | Amplitude (in μm) | Frequency | | 0.25 Hz | 0.5 Hz | | 60° | 90° | 60° | 90° | | SD (in μm) | RMS (in μm) | SD (in μm) | RMS (in μm) | SD (in μm) | RMS (in μm) | SD (in μm) | RMS (in μm) |
| | 90 | 1.6876 | 2.4099 | 3.1386 | 4.3457 | 2.8904 | 4.1973 | 3.6637 | 5.2480 | | 110 | 2.1992 | 3.2913 | 4.0012 | 5.8561 | 2.9940 | 4.5504 | 4.2329 | 6.1214 | | 130 | 2.7665 | 4.2916 | 4.9366 | 7.5628 | 3.2069 | 5.0194 | 4.9776 | 7.1812 |
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