Position Analysis of a Hybrid Serial-Parallel Manipulator in Immersion Lithography

<table class="figure-group"><tr class="fig-image" id="a"><td><object data="https://static.hindawi.com/articles/mpe/volume-2015/573071/figures/573071.fig.002a.svgz" name="573071.fig.002a" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(a) </b>The kinematic model</td></tr><tr class="fig-image" id="b"><td><object data="https://static.hindawi.com/articles/mpe/volume-2015/573071/figures/573071.fig.002b.svgz" name="573071.fig.002b" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(b) </b>The CAD model</td></tr></table>

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Mathematical Problems in Engineering

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Figure 2

Figure 2: Position Analysis of a Hybrid Serial-Parallel Manipulator in Immersion Lithography 