Position Analysis of a Hybrid Serial-Parallel Manipulator in Immersion Lithography

Table 1

Direct-inverse position analysis of the 3-PSP-P(P_H) HS-PM measured in frame (, , , , , , , , , , and ).

Direct	1	2	3	Inverse	4	5	6
	2.500000	2.200000	1.400000		1.000000	3.141593	0.500000
	2.000000	2.500000	2.200000		0.001000	0.010000	0.020000
	1.500000	1.700000	2.400000		2.000000	2.500000	2.900000
	0.200000	0.700000	0.400000		1.000000	0.300000	0.010000
	0.500000	0.100000	0.350000		0.002000	0.005000	0.001000
	0.100000	0.400000	0.500000		0.100000	0.800000	0.080000
	−1.735114	2.832609	0.489347		1.546799	3.647094	0.043040
	0.007869	0.007279	0.003988		2.076600	0.204843	2.925715
	2.177085	2.599314	2.369710		2.231900	0.076335	5.936067
	0.933895	4.646567	0.534729		0.170882	0.744787	0.134401
	0.006428	0.008624	0.002033		0.015882	1.069403	0.071905
	0.150000	0.550000	0.450000		0.029118	0.855213	0.025599
	−2.669009	−1.813957	−0.045381		0.000000	2.841593	0.490000
	0.003541	0.004172	0.003468		0.002355	0.013587	0.020979
	2.027085	2.049327	1.919709		1.900000	1.699856	2.819845
	0.000113	0.001052	−0.000589		−0.000251	−0.011449	0.004906
	0.000157	0.000031	0.000040		0.000025	−0.000597	0.005566
	2.027085	2.049327	1.919709		1.900000	1.699856	2.819845