Research Article

Clustering Ensemble for Identifying Defective Wafer Bin Map in Semiconductor Manufacturing

Table 6

Clustering result on the index of precision.

Hsu and Chien [8] Clustering ensemble
KB and PBKC and PCKB and PCKC and PBKB and PB and KC and PC

PrecisionA0.700.840.920.920.920.98
B0.500.660.960.920.620.96
C0.600.641.001.000.601.00
D0.700.980.920.920.981.00
E0.600.940.820.820.980.98
F0.800.980.760.760.980.98
Avg.0.650.840.900.890.850.98