Research Article
Clustering Ensemble for Identifying Defective Wafer Bin Map in Semiconductor Manufacturing
Table 6
Clustering result on the index of precision.
| | | Hsu and Chien [8] | Clustering ensemble | | | KB and PB | KC and PC | KB and PC | KC and PB | KB and PB and KC and PC |
| Precision | A | 0.70 | 0.84 | 0.92 | 0.92 | 0.92 | 0.98 | B | 0.50 | 0.66 | 0.96 | 0.92 | 0.62 | 0.96 | C | 0.60 | 0.64 | 1.00 | 1.00 | 0.60 | 1.00 | D | 0.70 | 0.98 | 0.92 | 0.92 | 0.98 | 1.00 | E | 0.60 | 0.94 | 0.82 | 0.82 | 0.98 | 0.98 | F | 0.80 | 0.98 | 0.76 | 0.76 | 0.98 | 0.98 | Avg. | 0.65 | 0.84 | 0.90 | 0.89 | 0.85 | 0.98 |
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