Clustering Ensemble for Identifying Defective Wafer Bin Map in Semiconductor Manufacturing

Table 8

Clustering result on the index of -measure.

		Hsu and Chien [8]	Clustering ensemble
			KB and PB	KC and PC	KB and PC	KC and PB	KB and PB and KC and PC
-measure	A	0.82	0.91	0.96	0.92	0.96	0.99
	B	0.67	0.79	0.81	0.84	0.71	0.98
	C	0.75	0.76	0.8	0.91	0.63	0.98
	D	0.82	0.89	0.96	0.96	0.99	1.00
	E	0.75	0.86	0.90	0.90	0.99	0.99
	F	0.89	0.99	0.86	0.86	0.99	0.99
	Avg.	0.78	0.87	0.88	0.90	0.88	0.99