Research Article
Dynamic Analysis of Multilayers Based MEMS Resonators
Table 1
Assumed geometrical and material properties.
| | Parameter | Value | Parameter | Value |
| | Beam length () | 150 µm | Effective Young’s modulus () | 166 GPa | | Beam thickness () | 1.0 µm | Density () | 2,332 kg/m3 | | Beam width () | 4.0 µm | Air gap depths ( and , resp.) | Case | 1.25 µm | 1.25 µm | | Case | 1 µm | 1.5 µm | | Case | 1.5 µm | 1 µm |
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