Analytical Approximate Solution for Nonlinear Behavior of Cantilever FGM MEMS Beam with Thermal and Size Dependency

Table 1

Geometrical and material parameters of the MEMS beam (polysilicon).

Variables	Narrow beam	Wide beam
Young’s modulus,	77	77
Poisson ratio,	0.33	0.33
Beam length,	300	300
Beam width,	0.5	50
the nominal gap,	2.5	2.5
Beam thickness,	1	1