Research Article
Analytical Approximate Solution for Nonlinear Behavior of Cantilever FGM MEMS Beam with Thermal and Size Dependency
Table 2
Pull-In voltage comparison for wide and narrow cantilevers of Table
1.
| Case | Pull-In voltage (V) | [47] | [48] | [49] | [50] | [51] | The present Numeric | The present Analytical |
| Narrow beam | 1.29 | 1.23 | 1.20 | 1.21 | 1.21 | 1.24 | 1.25 | Wide beam | 2.37 | 2.27 | 2.25 | 2.27 | 2.16 | 2.27 | 2.30 |
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Note that intermolecular force is neglected.
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