Research Article

Analytical Approximate Solution for Nonlinear Behavior of Cantilever FGM MEMS Beam with Thermal and Size Dependency

Table 2

Pull-In voltage comparison for wide and narrow cantilevers of Table 1.

CasePull-In voltage (V)
[47][48][49][50][51]The present Numeric The present Analytical

Narrow beam1.291.231.201.211.211.241.25
Wide beam2.372.272.252.272.162.272.30

Note that intermolecular force is neglected.