Analytical Approximate Solution for Nonlinear Behavior of Cantilever FGM MEMS Beam with Thermal and Size Dependency

Table 3

Geometrical and material parameters of the FGM microbeam.

Variables		Values
Nickel	Young’s modulus,	204
	Poisson ratio,	0.3
	coefficient of thermal expansion,	13.2
	thermal conductivity,	237
silicon nitride	Young’s modulus,	310
	Poisson ratio,	0.27
	coefficient of thermal expansion,	3.4
	thermal conductivity,	30
Beam width,		90
Beam length,		500
the nominal gap,		2
Beam thickness,		6
Permittivity of free space,
Planck’s constant divided by ,
the Hamaker constant
Speed of light,