Study on the Extraction Simulation of the Cylindrical Features

Table 3

Simulation parameters of cylindrical features of the part in Figure 9.

Symbol	1N1_X	1N3_X	3N1_X	3N3_X	1Y1_X	1Y3_X	3Y1_X	3Y3_X	Remarks
G (mm)	0	0	0.001	0.001	0	0	0.001	0.001	Equation (3)
	0	0	3	3	0	0	3	3
Ngf, Ngw, Ngr	5								Equations (2), (4), (5)
, ,	∼ = 0.112∼0.560 μm; ∼ = 0.066∼0.320 μm; ∼ = 0.050∼0.250 μm
θj, φj, ϑj	Random values between 0 and 2π
e(0) (mm)	0.001								Equation (7)
ϕ(z)	Random values from between 0 and 2π
R (mm)	(50–0.025)/2								Equation (8)
A (mm)	0	0.0005	0	0.0005	0	0.0005	0	0.0005
kr	1	3	1	3	1	3	1	3
Nrf, N, Nrr	5								Equations (9)–(11)
rfwj, ,	∼ = 0.112∼0.560 μm; ∼ = 0.066∼0.320 μm; ∼ = 0.050∼0.250 μm
θj, φj, ϑj	Random values between 0 and 2π
λf, λc, λs	λf = 1.6225 mm; λc = 0.3 mm, λs = 0.06 mm								Equations (2), (4), (5), (9)–(11)
δ(z), δ(ψ(z)) (mm)	Random values between 0 and 0.5 ∗  or between 0 and 0.5 ∗ rrw1								Equations (5), (11)
S	0	0	0	0	0.001	0.001	0.001	0.001	Equation (13)
CD (mm)	0
L (mm)	100
tilt_angle (radian)	0.001
mr, ms	mr = L/2.5 + 1 = 41, ms = L/2.5 = 40
nr, ns	500, 625, 1000, 1250, 2000, 2500, 5000, and 10000 in the same extraction sample
,	= 50π/2.5 ≈ 63,  = mr ∗ nr/ ≈ 1302