Multiresponse Optimization for a Novel Compliant Z-Stage by a Hybridization of Response Surface Method and Whale Optimization Algorithm

Table 18

Comparison of the proposed z-stage with previous studies.

Studies	Dimensions	Output displacement (μm)
H. Huang et al. [10]	103 mm × 74 mm × 60 mm	11.44
H. Huang et al. [11]	200 mm × 135 mm × 200 mm	40
The proposed z-stage	301 mm × 162 mm × 16 mm	454