Multiresponse Optimization for a Novel Compliant Z-Stage by a Hybridization of Response Surface Method and Whale Optimization Algorithm

Table 3

Consequences of output deformation as well as decoupling error.

Input displacement (μm)	Z-axis output deformation (μm)	X-axis output deformation (μm)	Decoupling error (%)	Magnification scale
5	29.77	0.0116	0.0389	5.95
10	59.54	0.0232	0.0389	5.95
15	89.31	0.0348	0.0389	5.95
20	119.08	0.0464	0.0389	5.95
25	148.85	0.0579	0.0389	5.95
30	178.61	0.0695	0.0389	5.95
35	208.38	0.0811	0.0389	5.95
40	238.15	0.0927	0.0389	5.95
45	267.92	0.1043	0.0389	5.95
50	297.69	0.1159	0.0389	5.95
55	327.46	0.1275	0.0389	5.95
60	357.23	0.1391	0.0389	5.95