Plasma and BIAS Modeling: Self-Consistent Electrostatic Particle-in-Cell with Low-Density Argon Plasma for TiC

Table 1

Parameter of the Ions.

Ion	Equation (16)	Equation (17)
Carbon (12)	12.96cm	15.18cm
Silicium (28)	7.52cm	7.71cm
Titanium (48)	5.03cm	4.55cm