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Modelling and Simulation in Engineering
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Modelling and Simulation in Engineering
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2011
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Article
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Tab 3
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Research Article
Plasma and BIAS Modeling: Self-Consistent Electrostatic Particle-in-Cell with Low-Density Argon Plasma for TiC
Table 3
Parameters of the electrons.
Quantity
Value
Electron density
10
12
m
−3
Electron temperature
1 eV