Modelling and Simulation in Engineering / 2012 / Article / Tab 1

Research Article

Simulation Study of Sensitivity Performance of MEMS Capacitive Bending Strain Sensor for Spinal Fusion Monitoring

Table 1

Capacitive strain sensor comparison.

ApplicationAutomobile tire strain monitoringRotating shaft surface strainSpinal fusion monitoring Spinal fusion monitoring

Design structureComb driveComb driveComb driveDouble layer cantilever
Sensing mechanismElectrodes gap manipulation using flexible epoxy resinElectrodes overlap area manipulationElectrodes gap and overlap area manipulationElectrodes gap manipulation
Sensitivity45.71 aF/ 255 aF/ 2.94 fF/ (0–1000  )0.02 pF/ (0–1000  )
Nominal capacitance 3.4–34.7 pF440 fF8.01 pF18–43 pF
Output patternNonlinearLinearNonlinearNonlinear
Minimum gap0.5 mm2 μm25 μm3 μm
Sensor materialFlexible substrate (copper with polyimide) on ultra flexible epoxy resinSOI wafer for substrate and device layer, aluminum electrodeSilicon boron doped very low resistivity
anodic bonding to borosilicate glass
Borosilicate glass, silicon p-type, gold electrodes

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