Simulation Study of Sensitivity Performance of MEMS Capacitive Bending Strain Sensor for Spinal Fusion Monitoring

Table 2

Sensor requirements.

Range of anticipated strain	0–1000 𝜇𝜀
Sensing element	Bending strain
Sensor dimension	Maximum of 10 mm × 2 mm
Wireless telemetry application	Low power requirement, capacitive is preferable