Modelling and Simulation in Engineering / 2012 / Article / Tab 3

Research Article

Simulation Study of Sensitivity Performance of MEMS Capacitive Bending Strain Sensor for Spinal Fusion Monitoring

Table 3

Specific values used in the calculation for all analysis parameters.

Analysis parameter (mm) (mm) (mm) (mm) (mm) (mm) (mm)

Gap study
 1.5 μm
 3 μm8.12.18.20.18.12.11.1
 5 μm

Anchor length
 0.5 mm8.10.6
 1 mm8.11.68.20.18.12.11.1
 l.5 mm8.12.1

Dielectric coverage
 33%Air: 6.1Air: 2.1
SiO2: 8.1SiO2: 6.1
 66%Air: 4.1Air: 2.18.20.18.12.11.1
SiO2: 8.1SiO2: 4.1
 100%Air: —Air: —
SiO2: 8.1SiO2: 2.1

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