Simulation Study of Sensitivity Performance of MEMS Capacitive Bending Strain Sensor for Spinal Fusion Monitoring

Table 5

Analysis outcome for different anchor length.

Anchor length, mm	0.5	1.0	1.5
Nominal capacitance (at 0 𝜇𝜀), pF	100.1602	117.2815	134.4027
Capacitance at 1000 𝜇𝜀, pF	37.3074	61.3576	84.7248
Sensitivity (0–1000 𝜇𝜀), pF/𝜇𝜀	0.0628	0.0559	0.0497
Maximum percentage difference, %	11.91	5.00	4.35
Average percentage difference, %	6.76	2.82	1.75