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Modelling and Simulation in Engineering
Volume 2014, Article ID 897315, 7 pages
Research Article

Analytic Model of Microcantilevers as Low Frequency Generator

Department of Physics & Electronics, University of Jammu, Jammu 180006, India

Received 3 January 2014; Accepted 18 March 2014; Published 25 May 2014

Academic Editor: Nikos D. Lagaros

Copyright © 2014 Sandeep Arya et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Finite element method (FEM) based simulation has been carried out, and an analytic model of microcantilevers using piezoelectric excitations is proposed. The model is based on the type of the selected material and geometry of the structure. The investigations are carried out with rectangular microcantilevers using silicon as the substrate. The high frequency analytic signals are applied to the input piezoelectric electrodes, and the resultant signal generated at the output piezoelectric electrode is recorded and analyzed. The analysis of the results showed that the proposed system is capable of generating a low frequency signal. Two microcantilevers with different dimensional aspects are used, and the results verified the application of microcantilever array as a low frequency signal generator.