Research Article

Analytic Model of Microcantilevers as Low Frequency Generator

Table 3

Material constants for the materials used in design.

Material constants

UnitsNm−2Nm−2Nm−2Nm−2Nm−2Nm−2Fm−1Fm−1Cm−2Cm−2Cm−2Cm−2
Silicon
203 × 109530 × 109 750 × 109 90 × 109 245 × 10960 × 10944293.72.50.21.3
Aluminium106 × 10960 × 109106 × 10959 × 109 25 × 10925 × 109220000
PZT-5H126 × 109800 × 109840 × 1090
120 × 10923 × 10915001017065233