Research Article
Analytic Model of Microcantilevers as Low Frequency Generator
Table 3
Material constants for the materials used in design.
| | Material constants | | | | | | | | | | | | | |
| Units | Nm−2 | Nm−2 | Nm−2 | Nm−2 | Nm−2 | Nm−2 | Fm−1 | Fm−1 | Cm−2 | Cm−2 | Cm−2 | Cm−2 | Silicon
| 203 × 109 | 530 × 109 | 750 × 109 | 90 × 109 | 245 × 109 | 60 × 109 | 44 | 29 | 3.7 | 2.5 | 0.2 | 1.3 | Aluminium | 106 × 109 | 60 × 109 | 106 × 109 | 59 × 109 | 25 × 109 | 25 × 109 | 2 | 2 | 0 | 0 | 0 | 0 | PZT-5H | 126 × 109 | 800 × 109 | 840 × 109 | 0
| 120 × 109 | 23 × 109 | 1500 | 10 | 17 | 0 | 65 | 233 |
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