Evaluation of the Thickness in Nanolayers Using the Transfer Matrix Method for Modeling the Spectral Reflectivity

Table 1

Thickness evaluation using ellipsometry, RBS, TEM, and reflectivity spectra (present work) techniques.

Thickness measurement (nm)
(22 ± 4)*	23^**
(59 ± 5)*	60^†
(104 ± 6)*	125^‡

Zn_𝑥Cd_(1−𝑥)Reflectivity; ^**Ellipsometry; ^†TEM; ^‡RBS.