Physics Research International / 2009 / Article / Tab 1

Research Letter

Evaluation of the Thickness in Nanolayers Using the Transfer Matrix Method for Modeling the Spectral Reflectivity

Table 1

Thickness evaluation using ellipsometry, RBS, TEM, and reflectivity spectra (present work) techniques.

Thickness measurement (nm)

(22 ± 4)*23**
(59 ± 5)*60
(104 ± 6)*125

Z n 𝑥 C d ( 1 𝑥 ) Reflectivity; **Ellipsometry; TEM; RBS.

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