Research Article

Structural and Optical Investigations of Heterostructures Based on :Si Solid Solutions Obtained by MOCVD

Table 2

Energy-dispersive X-ray analysis data.

SampleComposition of epitaxial film, at.%

at.%

at.%

at.%

at.%

at.%

EM2350 
; 
 flow = 0; 
 carrier =
50.0050.00
EM2346 
;  
 flow = 0;  
 carrier =
12.2237.1950.59
EM2438 
;  
 flow = 10;  
 carrier =
11.6532.1656.18
EM2449 
;  
 flow = 100;  
 carrier =
10.0739.0450.900.02
EM2342 
;  
 flow = 100;  
 carrier =
16.3732.9250.180.530.05
EM2343
;  
 flow = 200;  
 carrier =
16.3733.0650.000.530.04
EM2355 
;  
 flow = 200;  
 carrier =
21.4027.9149.900.780.07
EM2356 
;  
 flow = 300;  
 carrier =
21.0228.0550.270.660.09