Journals
Publish with us
Publishing partnerships
About us
Blog
Physics Research International
Table of Contents
Special Issues
Physics Research International
/
2014
/
Article
/
Tab 2
/
Research Article
Structural and Optical Investigations of Heterostructures Based on
:Si Solid Solutions Obtained by MOCVD
Table 2
Energy-dispersive X-ray analysis data.
Sample
Composition of epitaxial film, at.%
at.%
at.%
at.%
at.%
at.%
EM2350
;
flow = 0;
carrier =
—
50.00
50.00
—
—
EM2346
;
flow = 0;
carrier =
12.22
37.19
50.59
—
—
EM2438
;
flow = 10;
carrier =
11.65
32.16
56.18
—
—
EM2449
;
flow = 100;
carrier =
10.07
39.04
50.90
—
0.02
EM2342
;
flow = 100;
carrier =
16.37
32.92
50.18
0.53
0.05
EM2343
;
flow = 200;
carrier =
16.37
33.06
50.00
0.53
0.04
EM2355
;
flow = 200;
carrier =
21.40
27.91
49.90
0.78
0.07
EM2356
;
flow = 300;
carrier =
21.02
28.05
50.27
0.66
0.09