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Scanning
Volume 2017, Article ID 3982503, 8 pages
https://doi.org/10.1155/2017/3982503
Research Article

Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization

1State Key Laboratory of Management and Control for Complex Systems, Institute of Automation, Chinese Academy of Sciences, Beijing, China
2School of Statistics and Mathematics, Central University of Finance and Economics, Beijing, China

Correspondence should be addressed to Lu Deng; moc.anis@125ulgned

Received 15 March 2017; Accepted 8 May 2017; Published 19 June 2017

Academic Editor: Yajing Shen

Copyright © 2017 Chao Zhou et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Chao Zhou, Lu Deng, Long Cheng, Zhiqiang Cao, Shuo Wang, and Min Tan, “Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization,” Scanning, vol. 2017, Article ID 3982503, 8 pages, 2017. https://doi.org/10.1155/2017/3982503.