Table of Contents Author Guidelines Submit a Manuscript
Corrigendum

A corrigendum for this article has been published. To view the corrigendum, please click here.

Scanning
Volume 2017, Article ID 4058636, 10 pages
https://doi.org/10.1155/2017/4058636
Research Article

Microscopic Examination of Cold Spray Cermet Sn+In2O3 Coatings for Sputtering Target Materials

Wrocław University of Technology, Wyb. Wyspiańskiego 27, 50371 Wrocław, Poland

Correspondence should be addressed to M. Winnicki; lp.corw.rwp@ikcinniw.nicram

Received 27 July 2016; Accepted 25 September 2016; Published 9 January 2017

Academic Editor: Igor Altfeder

Copyright © 2017 M. Winnicki et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. D. J. Gaspar and E. Polikarpov, OLED Fundamentals: Materials, Devices, and Processing of Organic Light-Emitting Diodes, CRC Press, Boca Raton, Fla, USA, 2015.
  2. E. del Rio, E. Ivanov, K. Omi, and H. Teraoka, “High performance of high density and high transparency Indium Tin oxide (ITO) and Zinc Aluminum Oxide (ZAO),” in Proceedings of the 56th Annual Technical Conference, Providence, RI, USA, April 2013.
  3. A. Stadler, “Transparent conducting oxides—an up-to-date overview,” Materials, vol. 5, no. 12, pp. 661–683, 2012. View at Publisher · View at Google Scholar
  4. Y. Karzazi, “Organic light emitting diodes: devices and applications,” Journal of Materials and Environmental Science, vol. 5, no. 1, pp. 1–12, 2014. View at Google Scholar · View at Scopus
  5. H. Lin, J. Yu, N. Wang, S. Lou, and Y. Jiang, “Fabrication and properties of DC magnetron sputtered indium tin oxide on flexible plastic substrate,” Journal of Materials Science and Technology, vol. 25, no. 1, pp. 119–122, 2009. View at Google Scholar · View at Scopus
  6. M. K. M. Ali, K. Ibrahim, O. S. Hamad, M. H. Eisa, M. G. Faraj, and F. Azhari, “Deposited Indium Tin Oxide (ITO) thin films by dc- magnetron sputtering on Polyethylene Terephthalate substrate (PET),” Romanian Reports of Physics, vol. 56, no. 5-6, pp. 730–741, 2011. View at Google Scholar · View at Scopus
  7. D. Pelleymounter, “Analysis of film quality and deposition rate using high-frequency RF process power in low-heat, large-area ITO coating,” in Proceedings of the 56th Annual Technical Conference, Providence, RI, USA, April 2013.
  8. Z. Qiao, Fabrication and study of ITO thin films prepared by magnetron sputtering [Ph.D. thesis], 2003.
  9. O. Tuna, Y. Selamet, G. Aygun, and L. Ozyuzer, “High quality ITO thin films grown by dc and RF sputtering without oxygen,” Journal of Physics D: Applied Physics, vol. 43, no. 5, Article ID 055402, pp. 1–7, 2010. View at Publisher · View at Google Scholar · View at Scopus
  10. S. H. Ko, Organic Light Emitting Diode-Material, Process and Devices, Intech, Rijeka, Croatia, 2011.
  11. Y. Zhong, Y. C. Shin, C. M. Kim et al., “Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition,” Journal of Materials Research, vol. 23, no. 9, pp. 2500–2505, 2008. View at Publisher · View at Google Scholar · View at Scopus
  12. M. S. Farhan, E. Zalnezhad, A. R. Bushroa, and A. A. D. Sarhan, “Electrical and optical properties of Indium-tin Oxide (ITO) films by Ion-Assisted Deposition (IAD) at room temperature,” International Journal of Precision Engineering and Manufacturing, vol. 14, no. 8, pp. 1465–1469, 2013. View at Publisher · View at Google Scholar
  13. S. H. Mohamed, F. M. El-Hossary, G. A. Gamal, and M. M. Kahlid, “Properties of indium tin oxide thin films deposited on polymer substrates,” Acta Physica Polonica A, vol. 115, no. 3, pp. 704–708, 2009. View at Publisher · View at Google Scholar · View at Scopus
  14. M. Mazur, M. Szymańska, M. Kalisz, D. Kaczmarek, and J. Domaradzki, “Surface and mechanical characterization of ITO coatings prepared by microwave-assisted magnetron sputtering process,” Surface and Interface Analysis, vol. 46, no. 10-11, pp. 827–831, 2014. View at Publisher · View at Google Scholar · View at Scopus
  15. L. Wei and C. Shuying, “Photoelectric properties of ITO thin films deposited by DC magnetron sputtering,” Journal of Semiconductors, vol. 32, no. 1, Article ID 013002, pp. 1–4, 2011. View at Publisher · View at Google Scholar · View at Scopus
  16. A. Mohammadi Gheidari, E. Asl Soleimani, M. Mansorhoseini, S. Mohajerzadeh, N. Madani, and W. Shams-Kolahi, “Structural properties of indium tin oxide thin films prepared for application in solar cells,” Materials Research Bulletin, vol. 40, no. 8, pp. 1303–1307, 2005. View at Publisher · View at Google Scholar · View at Scopus
  17. Z. Ghorannevis, E. Akbarnejad, and M. Ghoranneviss, “Structural and morphological properties of ITO thin films grown by magnetron sputtering,” Journal of Theoretical and Applied Physics, vol. 9, no. 4, pp. 285–290, 2015. View at Publisher · View at Google Scholar
  18. C. May and J. Strümpfel, “ITO coating by reactive magnetron sputtering-comparison of properties from DC and MF processing,” Thin Solid Films, vol. 351, no. 1-2, pp. 48–52, 1999. View at Publisher · View at Google Scholar · View at Scopus
  19. A. Lakshmanan, Sintering of Ceramics—New Emerging Techniques, Intech Publisher, Rijeka, Croatia, 2012.
  20. Y. J. Zhang, X. J. Li, G. L. Sun, and X. H. Wang, “Preparing tin-doped indium oxide ceramic bulk via explosive consolidation and sintering of nanopowders,” Combustion, Explosion and Shock Waves, vol. 43, no. 2, pp. 225–232, 2007. View at Publisher · View at Google Scholar · View at Scopus
  21. K. Nakashima and Y. Kumahara, “Effect of tin oxide dispersion on nodule formation in ITO sputtering,” Vacuum, vol. 66, no. 3-4, pp. 221–226, 2002. View at Publisher · View at Google Scholar · View at Scopus
  22. H. Wang, X. Xu, X. Li, J. Zhang, and C. Li, “Synthesis and sintering of indium tin oxide nanoparticles by citrate-Nitrate combustion method,” Rare Metals, vol. 29, no. 4, pp. 355–360, 2010. View at Publisher · View at Google Scholar · View at Scopus
  23. J. Xu, L. Yang, H. Wang et al., “Sintering behavior and refining grains of high density tin doped indium oxide targets with low tin oxide content,” Journal of Materials Science: Materials in Electronics, vol. 27, pp. 3298–3304, 2016. View at Google Scholar
  24. C. Liu, J. Liu, and Y. Wang, “Preparation of indium tin oxide targets with a high density and single phase structure by normal pressure sintering process,” Rare Metals, vol. 30, no. 2, pp. 126–130, 2011. View at Publisher · View at Google Scholar · View at Scopus
  25. P. Lippens, A. Segers, J. Haemers, and R. De Gryse, “Chemical instability of the target surface during DC-magnetron sputtering of ITO-coatings,” Thin Solid Films, vol. 317, no. 1-2, pp. 405–408, 1998. View at Publisher · View at Google Scholar · View at Scopus
  26. D. C. Carter, “Arc prevention in magnetron puttering process,” in Proceedings of the 51st Annual Technical Conference, pp. 380–385, Chicago, Ill, USA, April 2008.
  27. S. Y. Chang, L. C. Tsao, M. J. Chiang, C. N. Tung, G. H. Pan, and T. H. Chuang, “Active soldering of Indium Tin Oxide (ITO) with Cu in air using an Sn3.5Ag4Ti(Ce, Ga) Filler,” Journal of Materials Engineering and Performance, vol. 12, no. 4, pp. 383–389, 2003. View at Publisher · View at Google Scholar
  28. V. Champagne, The Cold Spray Materials Deposition Process: Fundamentals and Applications, Woodhead, Cambridge, UK, 2007.
  29. G. Bae, J.-I. Jang, and C. Lee, “Correlation of particle impact conditions with bonding, nanocrystal formation and mechanical properties in kinetic sprayed nickel,” Acta Materialia, vol. 60, no. 8, pp. 3524–3535, 2012. View at Publisher · View at Google Scholar · View at Scopus
  30. H. Koivuluoto and P. Vuoristo, “Effect of powder type and composition on structure and mechanical properties of Cu+Al2O3 coatings prepared by using low-pressure cold spray process,” Journal of Thermal Spray Technology, vol. 19, no. 5, pp. 1081–1092, 2010. View at Publisher · View at Google Scholar · View at Scopus
  31. O. Tazegul, O. Meydanoglu, and E. S. Kayali, “Surface modification of electrical contacts by cold gas dynamic spraying process,” Surface and Coatings Technology, vol. 236, pp. 159–165, 2013. View at Publisher · View at Google Scholar · View at Scopus
  32. Q. Wang, K. Spencer, N. Birbilis, and M.-X. Zhang, “The influence of ceramic particles on bond strength of cold spray composite coatings on AZ91 alloy substrate,” Surface and Coatings Technology, vol. 205, no. 1, pp. 50–56, 2010. View at Publisher · View at Google Scholar · View at Scopus
  33. K. J. Hodder, H. Izadi, A. G. McDonald, and A. P. Gerlich, “Fabrication of aluminum-alumina metal matrix composites via cold gas dynamic spraying at low pressure followed by friction stir processing,” Materials Science & Engineering A, vol. 556, pp. 114–121, 2012. View at Publisher · View at Google Scholar · View at Scopus
  34. H. Koivuluoto, A. Coleman, K. Murray, M. Kearns, and P. Vuoristo, “High pressure cold sprayed (HPCS) and low pressure cold sprayed (LPCS) coatings prepared from OFHC Cu feedstock: overview from powder characteristics to coating properties,” Journal of Thermal Spray Technology, vol. 21, no. 5, pp. 1065–1075, 2012. View at Publisher · View at Google Scholar · View at Scopus
  35. M. Winnicki, A. Małachowska, M. Rutkowska-Gorczyca, P. Sokołowski, A. Ambroziak, and L. Pawłowski, “Characterization of cermet coatings deposited by low-pressure cold spraying,” Surface and Coatings Technology, vol. 268, pp. 108–114, 2015. View at Publisher · View at Google Scholar · View at Scopus
  36. Y.-M. Jin, J.-H. Cho, D.-Y. Park, J.-H. Kim, and K.-A. Lee, “Manufacturing and macroscopic properties of cold sprayed Cu-In coating material for sputtering target,” Journal of Thermal Spray Technology, vol. 20, no. 3, pp. 497–507, 2011. View at Publisher · View at Google Scholar · View at Scopus
  37. Y.-M. Jin, M.-G. Jeon, D.-Y. Park, H.-J. Kim, I.-H. Oh, and K.-A. Lee, “Manufacturing and macroscopic properties of cold sprayed Cu-Ga coating material for sputtering target,” Journal of Korean Powder Metallurgy Institute, vol. 20, no. 4, pp. 245–252, 2013. View at Publisher · View at Google Scholar
  38. A. Ganesan, M. Yamada, and M. Fukumoto, “Cold spray coating deposition mechanism on the thermoplastic and thermosetting polymer substrates,” Journal of Thermal Spray Technology, vol. 22, no. 8, pp. 1275–1282, 2013. View at Publisher · View at Google Scholar · View at Scopus
  39. K. H. Ko, H. Lee, and J. O. Choi, “Effect of Sn particle size on the intermetallic compound formations of cold sprayed Sn-Ni coatings,” Applied Surface Science, vol. 257, no. 7, pp. 2970–2977, 2011. View at Publisher · View at Google Scholar · View at Scopus
  40. M. Winnicki, A. Baszczuk, M. Rutkowska-Gorczyca, A. Malachowska, A. Ambroziak, and A. Małachowska, “Corrosion resistance of tin coatings deposited by cold spraying,” Surface Engineering, vol. 32, pp. 691–700, 2016. View at Google Scholar