Scanning / 2017 / Article / Fig 7

Research Article

Contrast of Backscattered Electron SEM Images of Nanoparticles on Substrates with Complex Structure

Figure 7

BSE contrast of SiO2 NP on ITO160 and ITO22 as a function of the WD. Comparison of experimental data (square symbols/solid lines) and MC-simulations using Screened Rutherford (circular symbols/dashed lines) and Cz Mott (triangular symbols/dashed lines) scattering cross-sections for (a) = 5 keV and (b) = 10 keV. Note the contrast inversion for ITO160 in (a) at a WD of 6 mm.