Contrast of Backscattered Electron SEM Images of Nanoparticles on Substrates with Complex Structure

Figure 8

SiO₂ NP BSE contrast as a function of at 4 mm WD on (a) ITO160 and (b) ITO22. Experimental data are displayed by square symbols/solid lines, MC-simulations on the basis of Screened Rutherford are indicated by circular symbols/dashed lines and on the basis of Cz Mott cross-sections by triangular symbols/dashed lines.

(a)

(b)