Research Article
Electron Beam Irradiation Induced Multiwalled Carbon Nanotubes Fusion inside SEM
Table 1
Parameters of each nanorobotics manipulator.
| | Parameters | Unit 1 | Unit 2 | Unit 3 | Unit 4 |
| | Model | SLC-1720-s/8301-UHV | SLC-1720-s/8301-UHV | TSDS-255C/8301-UHV | TSDS-255C/8301-UHV | | Dimensions (mm) | | | | | | Travel (mm) | , , | , , | , | , | | Rotate | −360°+360° | −360°+360° | −360°+360° | −360°+360° | | Linear resolution | 1 nm | 1 nm | 30 nm | 30 nm | | Rotate resolution | <1 microrad | <1 microrad | <1 microrad | <1 microrad |
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