Fast Specimen Boundary Tracking and Local Imaging with Scanning Probe Microscopy

Figure 1

Illustration of boundary tracking and local scanning method. Schematic of boundary point determination criteria (a), azimuth angle prediction (b), lost-step (c), adaptive step size adjustment (d), moving least squares (MLS) method (e), and planning local scanning path (f).

(a)

(b)

(c)

(d)

(e)

(f)