Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode

Figure 7

Voltage-displacement curve of horizontal probing. (a) The horizontal deformation-displacement curve based on the static mode (the slope of the retrace curve is 7 mv/nm). (b) The oscillation amplitude-displacement curve based on the TR mode (the slope of the retrace curve is about 12.7mv/nm).

(a)

(b)