Application of FIB-SEM Techniques for the Advanced Characterization of Earth and Planetary Materials

Table 1

FIB as an independent instrument or combined with other techniques.

Synergistic techniques	Features	Target materials	Conditions and suggestions	References
Stand-alone FIB-SEM	Cross-section imaging or 3D tomography integrated with multiple detectors	Clay minerals and oil shales (this study)	(1) Medium current to balance milling speed and minimized curtain effect; (2) Pt coated for protective layer; (3) Acquire high-resolution SE and BSE image simultaneously for later image segmentation	[92–94]
FIB and TEM	Microstructural and crystallographic characterization	Earth & planetary materials such as ore minerals, high pressure phases and extraterrestrial materials	(1) Stepping down the polishing currents to 10~50 pA/5 kV or even lower; (2) For irregular small particles, E-beam for Pt deposition is necessary	[36, 42, 56, 95, 96]
FIB and APT	3D chemical and isotopic information	U-Th-Pb isotope systems & trace element compositions in zircon, monazite etc.	(1) Pt/Au-coated as protective layer—evaporation field of carbon is too high; (2) Make a mark for selected position if the area of interest is relatively small	[64, 65, 97–99]
FIB and synchrotron techniques	Elemental mapping	Terrestrial shale kerogen organic carbon & extraterrestrial organic matter in planetary materials, e.g., carbonaceous chondrites.	(1) None carbon capping. Ideally no EXPOXY embedding; (2) Low current for final milling and low KV E-beam imaging to minimize damage; (3) Ensure STXM is performed prior to TEM on organic materials due to alteration of organic by high energy TEM beam	[68, 73, 100]