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2020
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Tab 2
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Review Article
Application of FIB-SEM Techniques for the Advanced Characterization of Earth and Planetary Materials
Table 2
Overview of ion beam current and resolution in commercial FIB systems.
FIB
Beam current
Resolution
Ga
0.1-100 nA
~3 nm
He
0.1-100 pA
~0.5 nm
Ne
0.1-100 pA
~1.9 nm
Xe
0.1-2
μ
A
<20 nm