Review Article

Application of FIB-SEM Techniques for the Advanced Characterization of Earth and Planetary Materials

Table 2

Overview of ion beam current and resolution in commercial FIB systems.

FIBBeam currentResolution

Ga0.1-100 nA~3 nm
He0.1-100 pA~0.5 nm
Ne0.1-100 pA~1.9 nm
Xe0.1-2 μA<20 nm