Multilayer Inorganic Electrets with SiO_𝟐 and Si_𝟑N_𝟒 Layers for Applications on Heated Machinery

Table 1

The electrets studied at elevated temperatures.

Electret type	Layer sequence, material, and thickness, nm
	1st	2nd	3rd	4th
ON-1	SiO2, 450	Si3N4, 150	—	—
OSRN	SiO2, 450	Si3N4−x , 150	—	—
ON-2	SiO2, 1000	Si3N4, 150	—	—
NO	Si3N4, 150	TEOS SiO2, 450	—	—
ONO	SiO2, 450	Si3N4, 150	TEOS SiO2, 450	—
ONON	SiO2, 450	Si3N4, 150	TEOS SiO2, 450	Si3N4, 150