Table of Contents
Smart Materials Research
Volume 2013 (2013), Article ID 498019, 16 pages
Research Article

Development and Application of One-Sided Piezoelectric Actuating Micropump

Department of Mechanical Engineering, National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan

Received 8 March 2013; Accepted 4 September 2013

Academic Editor: Osama J. Aldraihem

Copyright © 2013 H. K. Ma et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Three types of one-sided actuating piezoelectric micropumps are studied in this paper. In the first type, one-sided actuating micropump with two check valves can enhance the flow rate and prevent the back flow in suction mode to keep the flow in one direction. Furthermore, the frequency modulator is applied in the micropump to adjust and promote the maximum flow rate higher than 5.0 mL/s. In the second type, valveless micropump with secondary chamber shows that the secondary chamber plays a key role in the application of the valveless micropump. It not only keeps the flow in one direction but also makes the flow rate of the pump reach 0.989 mL/s. In addition, when a nozzle/diffuser element is used in valveless micropump, the flow rate can be further improved to 1.183 mL/s at a frequency of 150 Hz. In the third type, piezoelectric actuating pump is regarded as an air pump in the application of a microfuel cell system, which can increase more air inlet to improve the fuel/air reaction and further increase the performance of fuel cell.