Shock and Vibration

Shock and Vibration / 2013 / Article

Open Access

Volume 20 |Article ID 819398 | https://doi.org/10.3233/SAV-130786

Hassen M. Ouakad, "An Electrostatically Actuated MEMS Arch Band-Pass Filter", Shock and Vibration, vol. 20, Article ID 819398, 11 pages, 2013. https://doi.org/10.3233/SAV-130786

An Electrostatically Actuated MEMS Arch Band-Pass Filter

Received11 Sep 2012
Revised13 Dec 2012
Accepted02 Mar 2013

Abstract

This work presents an investigation of the dynamics of micromachined arches resonators and their potential to be utilized as band-pass filters. The arches are actuated by a DC electrostatic load superimposed to an AC harmonic load. The dynamic response of the arch is studied analytically using a Galerkin-based reduced-order model when excited near its fundamental and third natural frequencies. Several simulation results are presented demonstrating interesting jumps and snap-through behavior of the arches and their attractive features for uses as band-pass filters, such as their sharp roll-off from pass bands to stop bands and their flat response.

Copyright © 2013 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


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