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Shock and Vibration
Volume 20, Issue 4, Pages 809-819
http://dx.doi.org/10.3233/SAV-130786

An Electrostatically Actuated MEMS Arch Band-Pass Filter

Hassen M. Ouakad

Department of Mechanical Engineering, King Fahd University of Petroleum and Minerals 31261, Dhahran, Kingdom of Saudi Arabia

Received 11 September 2012; Revised 13 December 2012; Accepted 2 March 2013

Copyright © 2013 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

This work presents an investigation of the dynamics of micromachined arches resonators and their potential to be utilized as band-pass filters. The arches are actuated by a DC electrostatic load superimposed to an AC harmonic load. The dynamic response of the arch is studied analytically using a Galerkin-based reduced-order model when excited near its fundamental and third natural frequencies. Several simulation results are presented demonstrating interesting jumps and snap-through behavior of the arches and their attractive features for uses as band-pass filters, such as their sharp roll-off from pass bands to stop bands and their flat response.