Study on Effect of Ultrasonic Vibration on Grinding Force and Surface Quality in Ultrasonic Assisted Micro End Grinding of Silica Glass

Figure 9

Effects of ultrasonic amplitude and grinding parameters on grinding forces. (a) Effects of ultrasonic amplitude (𝑣_𝑤=100 μm/s, 𝑎_𝑝=2 μm, 𝑛=18000 r/min). (b) Effects of wheel speed (𝑣_𝑤=100 μm/s, 𝑎_𝑝=2 μm, 𝐴=8.5 μm). (c) Effects of depth of cut (𝑣_𝑤=100 μm/s, 𝑛=18000 r/min, 𝐴=8.5 μm). (d) Effects of wheel feed rate (𝑎_𝑝=2 μm, 𝑛=18000 r/min, 𝐴=8.5 μm).

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