Bifurcation Type Change of AC Electrostatically Actuated MEMS Resonators due to DC Bias

Table 1

Physical characteristics of a typical microbeam.

Parameter	Symbol	Value
Beam width	𝑏	20 μm
Beam length	𝐿	300 μm
Beam thickness	ℎ	2.0 μm
Initial gap distance	𝑔0	8.0 μm
Material density	𝜌0	2330 kg/m^3
Young’s modulus	𝐸0	169 GPa
Quality factor	𝑄	350
Peak AC voltage	𝑉0𝐴	12.5 V
Peak DC voltage	𝑉0𝐷	1.25 V