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Shock and Vibration
Volume 2015, Article ID 867171, 15 pages
http://dx.doi.org/10.1155/2015/867171
Research Article

Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam

State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, 800 Dongchuan Road, Shanghai 200240, China

Received 23 September 2014; Revised 8 January 2015; Accepted 3 February 2015

Academic Editor: Dumitru I. Caruntu

Copyright © 2015 Sha Zhang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Citations to this Article [4 citations]

The following is the list of published articles that have cited the current article.

  • Godara, and Joglekar, “Mitigation of residual oscillations in electrostatically actuated microbeams using a command-shaping approach,” Journal of Micromechanics and Microengineering, vol. 25, no. 11, 2015. View at Publisher · View at Google Scholar
  • Hassen M. Ouakad, Hussain M. Al-Qahtani, and Muhammad A. Hawwa, “Influence of squeeze-film damping on the dynamic behavior of a curved micro-beam,” Advances in Mechanical Engineering, vol. 8, no. 6, 2016. View at Publisher · View at Google Scholar
  • Joglekar, and Godara, “Alleviation of residual oscillations in electrostatically actuated variable-width microbeams using a feedforward control strategy,” Microsystem Technologies, vol. 23, no. 10, pp. 4441–4457, 2017. View at Publisher · View at Google Scholar
  • Jingjing Feng, Cheng Liu, Wei Zhang, and Shuying Hao, “Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error,” Micromachines, vol. 9, no. 1, pp. 34, 2018. View at Publisher · View at Google Scholar